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SciMater™ Intrinsic SiO2 Thermally Oxidized Silicon Wafer (Single-throw Hydrogen Peroxide)

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  • Description:SciMater™ Intrinsic SiO2 Thermally Oxidized Silicon Wafer (Single-throw Hydrogen Peroxide)
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SciMater™ Semiconductor Substrates

SciMater™ Intrinsic SiO₂ Thermal Oxide Silicon Wafers SSP Single-Side Oxide / SSP Double-Side Oxide

Intrinsic monocrystalline silicon substrates with dense thermally grown SiO₂ layers for 2D-material devices, electrical testing, dielectric studies, thin-film deposition, micro-/nanofabrication, surface modification, and low-background-current experiments. Single-side and double-side oxide structures are available, with common oxide thicknesses of 100 nm, 285 nm, and 300 nm.

Intrinsic Monocrystalline Silicon Thermally Grown SiO₂ Precision Single-Side Polished Single-/Double-Side Oxide 100 nm / 285 nm / 300 nm Custom Cutting Available

Product Overview

Intrinsic Silicon Substrate with Thermally Grown Oxide

SciMater™ Intrinsic SiO₂ Thermal Oxide Silicon Wafers use intrinsic monocrystalline silicon as the base substrate. A dense silicon dioxide layer is grown directly on the silicon surface through high-temperature dry oxidation, wet oxidation, or a combined thermal-oxidation process. The in-situ-grown oxide forms a tightly bonded interface with the silicon and can function as an electrical insulation layer, dielectric layer, protective layer, surface-functional layer, or optical interference layer.

Intrinsic silicon has a relatively low free-carrier concentration and can reduce substrate-related interference in low-leakage, electrical, dielectric, and RF measurements. The principal product structures are SSP single-side oxide and SSP double-side oxide. Crystal orientation, resistivity, wafer thickness, oxide thickness, and tolerances are subject to the confirmed order or corresponding batch documentation.

Thermal Oxide Structure
Thermally Grown SiO₂ Layer
Intrinsic Monocrystalline Silicon Substrate
SSP single-side oxide: the main functional surface contains the SiO₂ layer.
SSP double-side oxide: both wafer surfaces contain thermally grown SiO₂.

Key Product Features

01

Intrinsic Monocrystalline Silicon

Low free-carrier background for low-current, electrical, RF, dielectric, and interface studies.

02

Thermally Grown SiO₂

Dense and uniform oxide with a strongly bonded and stable silicon/oxide interface.

03

Single- or Double-Side Oxide

Single-side oxide supports front-side processing; double-side oxide provides insulation and protection on both surfaces.

04

Common Thickness Options

Standard options include 100 nm, 285 nm, and 300 nm; other thicknesses may be confirmed.

05

Low-Leakage Applications

Suitable for field-effect devices, dielectric tests, microelectrodes, and low-current sensor research.

06

2D-Material Optical Identification

285 nm and 300 nm oxide layers support locating and observing graphene and other 2D materials.

07

Custom Cutting

Square, rectangular, circular, mechanical-diced, and laser-scribed formats can be evaluated.

08

Configurable Parameters

Orientation, resistivity, thickness, tolerances, packaging, and batch inspection documents may be specified.

Core Product Parameter Comparison

The table below compares intrinsic SSP single-side oxide and intrinsic SSP double-side oxide wafers.

Comparison ItemIntrinsic SSP Single-Side Oxide WaferIntrinsic SSP Double-Side Oxide Wafer
Substrate MaterialIntrinsic monocrystalline siliconIntrinsic monocrystalline silicon
PolishingPrecision single-side polishedPrecision single-side polished
Oxide StructureSingle-side oxide on the primary functional surfaceThermal oxide layers on both front and back surfaces
Common Oxide Thicknesses100 nm, 285 nm, and 300 nm100 nm, 285 nm, and 300 nm
Other Oxide ThicknessesSubject to wafer size and batch availabilitySubject to wafer size and batch availability
Common Full-Wafer Size4 inch; other sizes available upon inquiry4 inch; other sizes available upon inquiry
Crystal Orientation<100>or<111>, subject to order confirmation<100>or<111>, subject to order confirmation
Conductivity TypeIntrinsic undoped or high-resistivity specificationIntrinsic undoped or high-resistivity specification
ResistivityConfirmed by order or batch documentationConfirmed by order or batch documentation
Back-Surface ConditionNo target oxide layer or batch-specific process conditionBack surface contains a thermally grown SiO₂ layer
Main AdvantageSimple structure, clear front-side process surface, and relatively lower costDouble-side insulation, double-side protection, and reduced back-side conduction effects
Recommended Applications2D materials, thin-film deposition, surface modification, and front-side device processingLow-leakage testing, dielectric studies, RF research, and double-side insulated device structures
Cutting ServicesSquare, circular, and customized cut piecesSquare, circular, and customized cut pieces
PackagingWafer box, single-wafer box, clean bag, or customized packagingWafer box, single-wafer box, clean bag, or customized packaging

Not every wafer size is available with every oxide thickness. Confirm wafer thickness, resistivity, oxide-thickness tolerance, TTV, Bow, Warp, and surface requirements before ordering.

Main Applications

01

2D Materials and Field-Effect Devices

For transfer, alignment, optical identification, and device fabrication using graphene, MoS₂, MXene, and other 2D materials.

02

Low-Background Electrical Testing

Suitable for low-leakage measurements, dielectric characterization, capacitor structures, microelectrodes, and electrical-device research.

03

Thin-Film Deposition

Compatible with evaporation, sputtering, CVD, ALD, spin coating, and solution-based film preparation.

04

Micro-/Nanofabrication

Suitable for photolithography, etching, pattern transfer, electrical isolation, and micro-/nanodevice process verification.

05

RF and Dielectric Research

Intrinsic or high-resistivity silicon can reduce the influence of substrate conduction on RF and dielectric measurements.

06

Surface Modification

Suitable for silanization, hydrophilic/hydrophobic treatment, molecular functionalization, biointerfaces, and surface chemistry.

07

Sensors and Microelectrodes

Useful as an insulating base substrate for gas, biological, electrochemical, and miniature sensors.

08

Research and Teaching

Suitable for semiconductor processing, 2D materials, thin-film analysis, and microfabrication education.

Product Selection Guide

Choosing Single-Side or Double-Side Oxide

Front-side processing onlySelect an intrinsic SSP single-side oxide wafer.
Double-side insulation requiredSelect an intrinsic SSP double-side oxide wafer.
Reduce back-side conductionUse a double-side oxide structure and confirm the substrate resistivity.
Front-side thin films or 2D materialsA single-side oxide structure is generally sufficient for routine experiments.
Double-side protection or wet processingChoose double-side oxide and confirm chemical compatibility.

Choosing Oxide Thickness

100 nmFor routine insulation, surface studies, and thin dielectric applications.
285 nmCommonly used for optical identification and transfer of graphene and other 2D materials.
300 nmSuitable for 2D materials, micro-/nanofabrication, and general insulating substrates.
Custom thicknessConfirm wafer size, oxide structure, tolerance, and required quantity.
High-precision devicesAlso confirm oxide uniformity, surface quality, and batch inspection documentation.

How to Use

1

Verify Product Parameters

Confirm dimensions, oxide structure, oxide thickness, orientation, resistivity, and quantity.

2

Identify the Oxide Surface

Use the label and order information to identify the single-side oxide, double-side oxide, and primary polished surface.

3

Handle Cleanly

Wear powder-free gloves and use wafer tweezers or a vacuum wand to handle the edge region.

4

Remove Loose Particles

Use clean nitrogen first and apply a compatible cleaning procedure when necessary.

5

Mount the Wafer

Confirm fixture compatibility and avoid edge stress, vacuum-chuck marks, or local bending.

6

Perform the Experiment

Set suitable conditions for transfer, deposition, photolithography, etching, or electrical testing.

7

Clean After Processing

Select a cleaning method that does not significantly etch or damage the SiO₂ layer.

8

Store in Sealed Packaging

After cleaning and drying, return the wafer to a wafer box or clean sample case and retain the batch information.

Fluoride-containing solutions can significantly etch SiO₂, and some strong alkaline systems may also affect the oxide. Evaluate chemical and thermal compatibility before cleaning, etching, or high-temperature processing.

Cleaning, Storage, and Maintenance

ItemRecommendationKey Precaution
Particle CleaningUse clean nitrogen or deionized-water rinsing firstAvoid dragging hard particles across the functional surface
Organic ContaminationSelect a process-compatible organic solventPrevent solvent residue after cleaning
Fluoride SystemsEvaluate material compatibility before useHF and other fluoride-containing solutions etch SiO₂
Strong AlkalisControl concentration, temperature, and treatment timeSome strong alkalis can affect both the oxide and silicon substrate
Surface ProtectionHandle only the edge or a non-critical regionAvoid contact with fingers, sharp tweezers, and paper fibers
Storage EnvironmentClean, dry, low-particle, and away from corrosive gasesA clean dry cabinet is recommended
PackagingKeep in the original wafer box, single-wafer box, or clean bagUse spacers between wafers to prevent surface rubbing
Opened PackagesUse promptly and reseal unused productsRecord the batch, opening date, and intended experiment

Ordering Information

Product Type+ Single-/Double-Side Oxide+ Full Wafer / Cut Piece+ Dimensions+ Oxide Thickness+ Orientation+ Resistivity+ Quantity+ Packaging
Quotation example:Intrinsic SSP double-side oxide wafer + 4 inch + 285 nm SiO₂ +<100>orientation + specified high-resistivity range + 10 wafers + individual wafer-box packaging.

FAQ

1What is an intrinsic SiO₂ thermal oxide silicon wafer?

It uses intrinsic monocrystalline silicon as the substrate, with an SiO₂ layer grown directly on the silicon surface by high-temperature thermal oxidation. The intrinsic substrate has a relatively low carrier concentration and is useful for experiments sensitive to substrate conduction.

2What is the difference between SSP single-side oxide and SSP double-side oxide?

An SSP single-side oxide wafer has the oxide layer on the principal functional surface and is suitable for front-side processing. An SSP double-side oxide wafer has oxide layers on both surfaces for double-side insulation, protection, and process isolation.

3How does intrinsic silicon differ from ordinary N-type or P-type silicon?

Intrinsic silicon generally has a lower dopant concentration and lower carrier background, making it suitable for low-leakage, electrical, dielectric, and RF studies. The actual resistivity must still be confirmed by batch.

4What are 285 nm and 300 nm oxide layers mainly used for?

They are commonly used for transfer, positioning, and optical observation of graphene, MoS₂, and other 2D materials, and they are also suitable for micro-/nanofabrication, thin-film deposition, and general insulation.

5Can the wafer be used directly for photolithography and thin-film deposition?

Yes. Before use, perform particle cleaning, dehydration, and surface pretreatment according to the process, and verify oxide thickness and fixture compatibility.

6Which solutions can etch the thermally grown SiO₂ layer?

HF and other fluoride-containing solutions can significantly etch SiO₂, and some strong alkaline systems may also affect it. Confirm concentration, temperature, treatment time, and material compatibility before use.

7Can other oxide thicknesses or cutting dimensions be customized?

Customization can be evaluated according to wafer size, oxide structure, target thickness, allowed tolerance, and quantity. Square, rectangular, circular, and laser-scribed formats can also be confirmed.

8Which parameters should be confirmed before ordering?

Confirm single- or double-side oxide, full wafer or cut piece, dimensions, oxide thickness, crystal orientation, resistivity, wafer thickness, quantity, tolerances, and packaging requirements.

Product Summary

SciMater™ Intrinsic SiO₂ Thermal Oxide Silicon Wafers are available in SSP single-side oxide and SSP double-side oxide structures. The combination of an intrinsic monocrystalline silicon substrate and a dense thermally grown SiO₂ layer is suitable for 2D-material devices, low-leakage measurements, dielectric research, thin-film deposition, micro-/nanofabrication, sensors, and surface studies. Product selection should focus on the number of oxide surfaces, oxide thickness, crystal orientation, resistivity, wafer size, and cutting format.

Product dimensions, resistivity, crystal orientation, wafer thickness, oxide thickness, tolerances, surface grade, and inspection documentation are subject to the confirmed order and corresponding batch information.

Intrinsic Double-Side Oxide Silicon Wafer Price List

Polishing × Size × Oxide Thickness × N/P Type × Crystal Orientation Price Matrix

Covers intrinsic SSP double-side oxide and intrinsic DSP double-side oxide silicon wafers and cut pieces. All prices are shown in USD.

Material: Intrinsic Si / SiO₂ Product Systems: Intrinsic SSP Double-Side Oxide / Intrinsic DSP Double-Side Oxide Conductivity Type: N-Type / P-Type Crystal Orientation:<100>/<110>/<111> Price Unit: USD / Wafer or Piece
Oxide SystemProduct FormSizeOxide Thickness / SpecificationN-Type Intrinsic Oxide SiliconP-Type Intrinsic Oxide Silicon
<100><110><111><100><110><111>
Intrinsic SSP Double-Side Oxide Specifications
Intrinsic SSP Double-Side Oxide Intrinsic Silicon · Single-Side Polished · Double-Side Oxidized Square pieces, circular pieces, processed wafers, and 2–8 inch intrinsic double-side oxide silicon wafers. Cut Piece5 × 5 mm300 nm$8$8$8$8$8$8
Cut PieceØ10 mm300 nm$10$10$10$10$10$10
Cut Piece10 × 10 mm300 nm$10$10$10$10$10$10
Cut PieceØ15 mm300 nm$14$14$14$14$14$14
Cut Piece15 × 15 mm300 nm$14$14$14$14$14$14
Cut PieceØ20 mm300 nm$17$17$17$17$17$17
Cut Piece20 × 20 mm300 nm$17$17$17$17$17$17
Full Wafer2 Inch285 nm$60$60$60$60$60$60
Full Wafer3 Inch285 nm$108$108$108$108$108$108
Full Wafer4 Inch10 nm$130$130$130$130$130$130
Full Wafer4 Inch20 nm$108$108$108$108$108$108
Full Wafer4 Inch50–2000 nm$84$84$84$84$84$84
Full Wafer4 Inch7 μm$340$340$340$340$340$340
Processed Wafer4 InchApprox. 55 SSP Pieces, 10 × 10 mm Laser-Scribed$103$103$103$103$103$103
Processed Wafer4 InchApprox. 60 SSP Pieces, 10 × 10 mm Diced$116$116$116$116$116$116
Full Wafer5 Inch5 μm$228$228$228$228$228$228
Full Wafer6 Inch3 μm$340$340$340$340$340$340
Full Wafer8 Inch285 nm$244$244$244$244$244$244
Intrinsic DSP Double-Side Oxide Specifications
Intrinsic DSP Double-Side Oxide Intrinsic Silicon · Double-Side Polished · Double-Side Oxidized Intrinsic double-side-polished, double-side-oxidized circular silicon pieces. Circular PieceØ10 mm7 μm$40$40$40$40$40$40
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Partial references citing our materials (from Google Scholar)


Carbon Dioxide Reduction

1. ACS Nano Strain Relaxation in Metal Alloy Catalysts Steers the Product Selectivity of Electrocatalytic CO2 Reduction

The bipolar membrane (Fumasep FBM) in this paper was purchased from SCI Materials Hub, which was used in rechargeable Zn-CO2 battery tests. The authors reported a strain relaxation strategy to determine lattice strains in bimetal MNi alloys (M = Pd, Ag, and Au) and realized an outstanding CO2-to-CO Faradaic efficiency of 96.6% with outstanding activity and durability toward a Zn-CO2 battery.


2. Front. Chem. Boosting Electrochemical Carbon Dioxide Reduction on Atomically Dispersed Nickel Catalyst

In this paper, Vulcan XC-72R was purchased from SCI Materials Hub. Vulcan XC 72R carbon is the most common catalyst support used in the anode and cathode electrodes of Polymer Electrolyte Membrane Fuel Cells (PEMFC), Direct Methanol Fuel Cells (DMFC), Alkaline Fuel Cells (AFC), Microbial Fuel Cells (MFC), Phosphoric Acid Fuel Cells (PAFC), and many more!


3. Adv. Mater. Partially Nitrided Ni Nanoclusters Achieve Energy-Efficient Electrocatalytic CO2 Reduction to CO at Ultralow Overpotential

An AEM membrane (Sustainion X37-50 Grade RT, purchased from SCI Materials Hub) was activated in 1 M KOH for 24 h, washed with ultra-purity water prior to use.


4. Adv. Funct. Mater. Nanoconfined Molecular Catalysts in Integrated Gas Diffusion Electrodes for High-Current-Density CO2 Electroreduction

In this paper (Supporting Information), an anion exchanged membrane (Fumasep FAB-PK-130 obtained from SCI Materials Hub (www.scimaterials.cn)) was used to separate the catholyte and anolyte chambers.

SCI Materials Hub: we also recommend our Fumasep FAB-PK-75 for the use in a flow cell.


5. Appl. Catal. B Efficient utilization of nickel single atoms for CO2 electroreduction by constructing 3D interconnected nitrogen-doped carbon tube network

In this paper, the Nafion 117 membrane was obtained from SCI Materials Hub.


6. Vacuum Modulable Cu(0)/Cu(I)/Cu(II) sites of Cu/C catalysts derived from MOF for highly selective CO2 electroreduction to hydrocarbons

In this paper, Proton exchange membrane (Nafion 117), Nafion D520, and Toray 060 carbon paper were purchased from SCI Materials Hub.


7. National Science Review Confinement of ionomer for electrocatalytic CO2 reduction reaction via efficient mass transfer pathways

An anion exchange membrane (PiperION-A15-HCO3) was obtained from SCI Materials Hub.


8. Catalysis Communications Facilitating CO2 electroreduction to C2H4 through facile regulating {100} & {111} grain boundary of Cu2O

Carbon paper (TGPH060), membrane solution (Nafion D520), and ionic membrane (Nafion N117) were obtained from Wuhu Eryi Material Technology Co., Ltd (a company under SCI Materials Hub).


Batteries

1. J. Mater. Chem. A Blocking polysulfides with a Janus Fe3C/N-CNF@RGO electrode via physiochemical confinement and catalytic conversion for high-performance lithium–sulfur batteries

Graphene oxide (GO) in this paper was obtained from SCI Materials Hub. The authors introduced a Janus Fe3C/N-CNF@RGO electrode consisting of 1D Fe3C decorated N-doped carbon nanofibers (Fe3C/N-CNFs) side and 2D reduced graphene oxide (RGO) side as the free-standing carrier of Li2S6 catholyte to improve the overall electrochemical performance of Li-S batteries.


2. Joule A high-voltage and stable zinc-air battery enabled by dual-hydrophobic-induced proton shuttle shielding

This paper used more than 10 kinds of materials from SCI Materials Hub and the authors gave detailed properity comparsion.

The commercial IEMs of Fumasep FAB-PK-130 and Nafion N117 were obtained from SCI Materials Hub.

Gas diffusion layers of GDL340 (CeTech) and SGL39BC (Sigracet) and Nafion dispersion (Nafion D520) were obtained from SCI Materials Hub.

Zn foil (100 mm thickness) and Zn powder were obtained from the SCI Materials Hub.

Commercial 20% Pt/C, 40% Pt/C and IrO2 catalysts were also obtained from SCI Materials Hub.


3. Journal of Energy Chemistry Vanadium oxide nanospheres encapsulated in N-doped carbon nanofibers with morphology and defect dual-engineering toward advanced aqueous zinc-ion batteries

In this paper, carbon cloth (W0S1011) was obtained from SCI Materials Hub. The flexible carbon cloth matrix guaranteed the stabilization of the electrode and improved the conductivity of the cathode.


4. Energy Storage Materials Defect-abundant commercializable 3D carbon papers for fabricating composite Li anode with high loading and long life

The 3D carbon paper (TGPH060 raw paper) were purchased from SCI Materials Hub.


5. Nanomaterials A Stable Rechargeable Aqueous Zn–Air Battery Enabled by Heterogeneous MoS2 Cathode Catalysts

Nafion D520 (5 wt%), and carbon paper (GDL340) were received from SCI-Materials-Hub.


6. SSRN An Axially Directed Cobalt-Phthalocyanine Covalent Organic Polymer as High-Efficient Bifunctional Catalyst for Zn-Air Battery

Carbon cloth (W0S1011) and other electrochemical consumables required for air cathode were provided by SCI Materials Hub.


Oxygen Reduction Reaction

1. J. Chem. Eng. Superior Efficiency Hydrogen Peroxide Production in Acidic Media through Epoxy Group Adjacent to Co-O/C Active Centers on Carbon Black

In this paper, Vulcan XC 72 carbon black, ion membrane (Nafion N115, 127 μL), Nafion solution (D520, 5 wt%), and carbon paper (AvCarb GDS 2230 and Spectracarb 2050A-1050) were purchased from SCI Materials Hub.


2. Journal of Colloid and Interface Science Gaining insight into the impact of electronic property and interface electrostatic field on ORR kinetics in alloy engineering via theoretical prognostication and experimental validation

The 20 wt% Pt3M (M = Cr, Co, Cu, Pd, Sn, and Ir) were purchased from SCI Materials Hub. This work places emphasis on the kinetics of the ORR concerning Pt3M (M = Cr, Co, Cu, Pd, Sn, and Ir) catalysts, and integrates theoretical prognostication and experimental validation to illuminate the fundamental principles of alloy engineering.


Water Electrolysis

1. International Journal of Hydrogen Energy Gold as an efficient hydrogen isotope separation catalyst in proton exchange membrane water electrolysis

The cathodic catalysts of Pt/C (20 wt%, 2–3 nm) and Au/C (20 wt%, 4–5 nm) were purchased from SCI Materials Hub.


2. Small Science Silver Compositing Boosts Water Electrolysis Activity and Durability of RuO2 in a Proton-Exchange-Membrane Water Electrolyzer

Two fiber felts (0.35 mm thickness, SCI Materials Hub) were used as the porous transport layers at both the cathode and the anode.


3. Advanced Functional Materials Hierarchical Crystalline/Amorphous Heterostructure MoNi/NiMoOx for Electrochemical Hydrogen Evolution with Industry-Level Activity and Stability

Anion-exchange membrane (FAA-3-PK-130) was obtained from SCI Materials Hub website.


Fuel Cells

1. Polymer Sub-two-micron ultrathin proton exchange membrane with reinforced mechanical strength

Gas diffusion electrode (60% Pt/C, Carbon paper) was purchased from SCI Materials Hub.


Characterization

1. Chemical Engineering Journal Electrochemical reconstitution of Prussian blue analogue for coupling furfural electro-oxidation with photo-assisted hydrogen evolution reaction

An Au nanoparticle film was deposited on the total reflecting plane of a single reflection ATR crystal (SCI Materials Hub, Wuhu, China) via sputter coater.

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